Ensure product quality with targeted and continuous infrared temperature measurements.
Like other applications in the semiconductor industry, your ideal solution depends on your facility; however, there are multiple options that are ideal for integration with your process. In CVD processing, you can rely on products like the Thermalert 4.0 and other spot sensors to get the exact temperature every time.
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Following the polishing process, the wafers are etched with their respective circuitry layouts prior to going through the chemical vapor deposition (CVD) process. Here, the wafer is placed in a gas chamber and is continuously heated in various ways, depending on the facility.
As the gaseous reactant is being baked onto the wafer surface, temperature is critical to the final product of the wafer. During this process, a fixed sensor can be placed outside of the gas chamber to continuously take the temperature of the wafer – ensuring nothing damages the wafer.