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Crystal Growing

Keep temperatures under your control with products designed to integrate with your process.

Once created, the polysilicon must be processed through a crystal pulling machine to become a single crystal. There are several applications that rely on temperature control in this process. One application requires users to control the crucible temperature on the crystal pulling machine, which relies on temperature control in a variety of spots.

  • At a Glance
  • Featured Solutions

The first place that relies on temperature control is the crucible. In this application, temperature can be controlled by monitoring the coils to measure the crucible temperature. This is typically straightforward and can be achieved with a fixed pyrometer like the Endurance or Mi3-100 series. However, it can be difficult to measure crucible temperatures accurately due to reflections, but by holding the system at a pre-determined temperature, you can use a two-color pyrometer to get an accurate temperature reading.

The second spot that relies on temperature control is the melt temperature. Here, the polysilicon ingot begins to melt and is pulled upward to form a singular crystal. Because of this, you must monitor the product in multiple places, perpendicular to the machine, to control the melt. The best tool for this application varies depending on your process; however, a two-color fixed pyrometer is typically suitable.

The third area is diameter control. Here, users need to control the diameter of the crystal (meniscus) as it is pulled upward. Diameter control is critical in ensuring the final product, as any mistakes could result in the entire silicon rod being discarded. In some crystal growing facilities, a 1-micron sensor (such as the Endurance)* is efficient. At other sites, a one-color sensor such as the Mi3-100 series may be the best option. Overall, it comes down to how your process is setup, your needs and what can best integrate with.

*Note: Fluke Process Instruments also offers a fiber-optic Endurance sensor that may be suitable for your application.

Infrared Temperature Solutions
  • Standard USB 2.0 digital interface for remote setup and configuration with optional network communications module (RS485)
  • Field Calibration Software for on-site calibration of sensors, reducing service time and expense
  • Standard optically isolated 48VAC/300mA relay outputs eliminate need for separate limit switches or alarms
Infrared Temperature Solutions
  • Single unit designed to handle wider temperature ranges to suit any welding or forming application
  • Enhanced software for data capturing, trending analyses and quality reports
  • Integrated galvanically isolated I/O to reduce system installation costs

Get more information about Fluke Process Instruments solutions to this application