Due to the major manufacturing differences that can be found across the semiconductor industry, there is no “one-size-fits-all” solution beyond a non-contact infrared temperature sensor. At Fluke Process Instruments, we believe that pinpointing a specific sensor can only be achieved after we fully understand your process and specific needs. For example, facilities that use quartz tube lamps typically cannot use 1-micron sensors because most of these lamps emit energy at about 1 micron – so the sensor will pick up the quartz tube rather than the wafer.
Additionally, in some applications after the wafer its heated and cooled down slowly, which anneals any of the stress that may build up in the wafer. In this instance, most sites are concerned about uniform heating across the wafer, as if it overheats it may warp and be destroyed. How this process is performed can also impact the appropriate sensor for your process.
