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Wafer Annealing

Our team of experts will work with you to fully understand your process and needs before suggesting a specific solution.

Once the chemical vapor deposition (CVD) process is complete, the wafers must be heat treated. However, there are multiple different ways that the wafer can be heat treated depending on your process and facility – including quartz tube lamps, induction heating, and resistance coating.

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Due to the major manufacturing differences that can be found across the semiconductor industry, there is no “one-size-fits-all” solution beyond a non-contact infrared temperature sensor. At Fluke Process Instruments, we believe that pinpointing a specific sensor can only be achieved after we fully understand your process and specific needs. For example, facilities that use quartz tube lamps typically cannot use 1-micron sensors because most of these lamps emit energy at about 1 micron – so the sensor will pick up the quartz tube rather than the wafer.

Additionally, in some applications after the wafer its heated and cooled down slowly, which anneals any of the stress that may build up in the wafer. In this instance, most sites are concerned about uniform heating across the wafer, as if it overheats it may warp and be destroyed. How this process is performed can also impact the appropriate sensor for your process.

Infrared Temperature Solutions
  • Dedicated spectral models P3 (3.43 µm) and P7 (7.9 µm) to provide accurate temperature measurements even for very thin plastics even for very low temperature (P3 down to 25° (77 (°F) and P7 10°C (50 °F))
  • Spectal ranges P3 and P7 in one product series cover most common plastic materials
Infrared Temperature Solutions
  • Simultaneous background temperature compensation and remote emissivity adjustment using an analog input or fieldbus communication
  • Field replacable window without recalibration with best in class 4 year warranty
  • Measurements down to 50°C (122°F) (with short wavelength Endurance 3M models

Get more information about Fluke Process Instruments solutions to this application